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Comparison of CF4 and C4F8 gas etching profiles by ...
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Comparison of CF4 and C4F8 gas etching profiles by ...
Website URL:
http://iopscience.iop.org/article/10.7567/JJAP.54.036501
Category:
Recycled Plastic
The CF 4 and C 4 F 8 gas etching profiles of oxide films were compared by multiscale simulation that comprises gas reaction, sheath, and surface reaction models.
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